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SemiQCM™ Sensors for TDMAT Precursor Monitoring

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詳細信息 在線詢價

好處

  • Real-Time, in situ process monitoring
  • Prevent over-etching, identify chamber clean end point
  • Identify equipment or process state fault

功能

  • QCM data monitored at 10Hz
  • FabGuard correlates QCM data to tool state and process step
  • Precise measurement of deposition or etch rates
  • Sensitivity & precision for sub-monolayer thickness measurement

典型應(yīng)用

  • Semiconductor Manufacturing

規(guī)格

類型 SemiQCM Sensors for TDMAT Precursor Monitoring
Maximum Temperature 200°C
Sensor head Size (Maimum envelope) 23.87 mm O.D. x 29.19 mm (0.94 in. O.D. x 1.15 in.)
Mounting Feedthrough KF 40
Materials  
Body and Holder 304 stainless steel
Springs Au plated BeCu
Coaxial Line 5 mm (1.88 in.) O.D. stainless steel
Other Mechanical Parts 18-8 or 304 stainless steel, Hasloy® c276
Insulators >99% Al2O3 in vacuum: Teflon® used elsewhere
Wire 1. Ni (in vacuum)2. Ni plated Cu (elsewhere)
Braze Vacuum process high temperature NiCr alloy
Crystal 13.97 mm (0.550 in.) diameter

零件號

SemiQCM Sensors for TDMAT Precursor Monitoring
零件號 明細
750-7000-G5 SEMI QCM SENSOR ASSY 50MM
750-7000-G6 Semi QCM Sensor Assy 60mm
750-7000-G7 Semi QCM Sensor Assy 70mm
750-7000-G8 Semi QCM Sensor Assy 80mm
750-7000-G9 Semi QCM Sensor Assy 90mm
750-7000-G10 Semi QCM Sensor Assy 100mm
750-7000-G11 Semi QCM Sensor Assy 110mm
750-7000-G12 Semi QCM Sensor Assy 120mm
750-7000-G13 Semi QCM Sensor Assy 130mm
750-7000-G14 Semi QCM Sensor Assy 140mm
750-7000-G15 Semi QCM Sensor Assy 150mm

耗材

SemiQCM Sensors for TDMAT Precursor Monitoring
零件號 明細
750-7013-G1S Crystal Holder Assembly Spare
750-1090-G10 Sensor Crystals, 6MHz, SC Alloy

備件

SemiQCM Sensors for TDMAT Precursor Monitoring
零件號 明細
007-023 陶瓷夾持器
750-171-P1 指形彈簧觸點
750-7005-G1S Crystal Holder and Retainer Spring Spare Assembly

數(shù)據(jù)表

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