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Gemini™ MxG5xx 大氣壓至超高真空真空計(jì)

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好處

  • Long lifetime in harsh environments

  • 在惡劣環(huán)境下,使用壽命長(zhǎng)

  • 低雜散磁場(chǎng)
  • 零維護(hù) - 可換插頭
  • 超緊湊尺寸
  • 抗腐蝕饋入裝置
  • 可選測(cè)量電流
  • 2 relay setpoints (in conjunction with MxG55x EtherCAT Version)
  • EtherCAT and RS232/ RS485 digital interace

典型應(yīng)用

  • 基本壓力監(jiān)視和控制,在蒸發(fā)和濺射鍍膜應(yīng)用中從大氣壓到高真空。
  • 一般真空測(cè)量 - 工業(yè)爐、建筑玻璃、半導(dǎo)體、冰箱和空調(diào)。
  • 分析和研發(fā)應(yīng)用 – 質(zhì)譜分析、電子顯微鏡、醫(yī)療、眼科、光學(xué)和高能物理。

新聞

新一代冷陰極/冷陰極-皮拉尼組合真空計(jì)現(xiàn)在開(kāi)放訂購(gòu)!

規(guī)格

類(lèi)型 MAG5xx MPG5xx
測(cè)量系統(tǒng) Cold cathode ionization measurement system (according to the inverted magnetron principle) Pirani and cold cathode ionization measurement system (according to the inverted magnetron principle)
測(cè)量范圍(空氣、氮?dú)猓?/td> 1×10-9 … 1×10-2 1×10-9 … 1000
準(zhǔn)確度 (N2)    
1×10-8 … 1×10-2 毫巴 % of reading 30

30

1×10-2 … 100 毫巴 % of reading - 30
100 … 1000 毫巴 % of reading - 50
可重復(fù)性 (N2)    
1×10-8 … 1×10-2 毫巴 % of reading 5 -
1×10-8 … 100 毫巴 % of reading - 5
安裝定位 any any
容許壓力 bar (absolute) 10 (limited to inert gases <> 10 (limited to inert gases <>
容許溫度    
運(yùn)行(環(huán)境) °C +5 ... +55 +5 ... +55
法蘭烘烤 (1) °C <150 <150
儲(chǔ)存 °C -40 ... +70 -40 ... +70
燈絲溫度 °C - 120
一年 30 天的相對(duì)濕度    
1×10-7 … 1×10-2 毫巴 % <95 (non-condensing) <95 (non-condensing)
1×10-8 … 1×10-2 毫巴 % <70 (non-condensing) <70 (non-condensing)
供電電壓    
在量規(guī) (2) V (dc) +14.5 ... +30 +14.5 ... +30
波紋 V (p-p)

<1

<1

功耗 W <2 <2
待連接的保險(xiǎn)絲 AT <1 <1
電壓范圍    
模擬輸出 V 0 ... +10.5 0 ... +10.5
測(cè)量范圍    
3MAx-xxx-xxxN V <+0.5  
3MBx-xxx-xxxP V -  
3MAx-xxx-xxxQ V +0.667 ... +10  
電壓比壓力    
3MAx-xxx-xxxN volts per decade 1 (logarithmic)  
3MBx-xxx-xxxP volts per decade -  
3MAx-xxx-xxxQ volts per decade 1.33 (logaritmic)  
錯(cuò)誤信號(hào)    
3MAx-xxx-xxxN V <+0.5  
3MA-xxx-xxxQ V <+0.3  
3MBx-xxx-xxxP V -  
Output impedance ?

2 x 4.7 (short circuit-proof)

 
Load impedance k? >10 (short circuit-proof)  
階躍響應(yīng)時(shí)間    
p > 10-6 毫巴 ms

<100

<100

p = 10-8 毫巴 s

~1

 
量規(guī)標(biāo)識(shí) (FCC connector gauges)    
3MAx-0xx-000N k? -  
3MAx-0xx-000Q k? 100  
3MBx-0xx-000P k? -  
狀態(tài)(針 6)    
Current rating mA 100 (sink)  
High Voltage is ON V (dc) +14.5 ... +30 (depending on supply voltage)  
High Voltage is OFF V (dc) 0  
Status signal, digital output (D-sub connector)    
Supply voltage V (dc)

<30

 
Current rating mA 100  
High voltage ON V (dc)

0

 
High voltage OFF open  
電氣連接    
3Mxx-0xx-000x FCC68, 8-pin, female  
3Mxx-0xx-010x D-sub, 9-pin, male  
3Mxx-0xx-04xx D-Sub HD, 15-pin, male (for RS232/485 version)  
3Mxx-xxx-x2Gx D-Sub HD, 15-pin, male (for EtherCAT Version)  
傳感器電纜    
3Mxx-0xx-000x 8-pin, shielded  
3Mxx-0xx-010x 9-pin, shielded  
3Mxx-0xx-04xx D-Sub HD, 15-pin, male (for RS232/485 version)  
3Mxx-xxx-x2Gx D-Sub HD, 15-pin, male (for EtherCAT Version)  
電纜長(zhǎng)度    
FCC connector cable m

<50 (0.14 mm2/ conductor)

 
High voltage (in the measuring chamber)    
Ignition voltage kV <4.5  
工作電壓 kV <3.3 <3.3
Current (in the measuring chamber)    
High current µA <380  
Low current µA <130  
Setpoint relays (MxG55x)    
Range (N2) mbar bar 5x10-5 ... 1500  
Relay contact normally open (NO), potential free  
Hysteresis % of threshold 10  
Contact rating of mechanical relays V/A <30/ <1  
Switching time ms <30  
曝露在真空的材料    
3Mx0-xxx-xxxx Ni alloy, Mo, AI2O3, glass, stainless steels  
3Mx3-xxx-xxxx Mo, AI2O3, stainless steels  
3Mx0-11x-xxxx Ni alloy, Mo, Al2O3, glass, Ti, stainless steels  
3Mx3-11x-xxxx Mo, Al2O3, Ti, stainless steels  
內(nèi)部容量    
DN 25 ISO-KF cm³
DN 40 ISO-KF cm³ ~20.9
DN 40 CF-F cm³ ~25.2  
DN 40 CF-R cm³ ~25.6  
內(nèi)部容量 cm³ 22.8 22.8
重量 (MxG50x)    
DN 25 ISO-KF g

<280

<280

DN 40 ISO-KF g <320
DN 40 CF-F & CF-R g <570 <570
Weight (MxG55x)    
DN 25 ISO-KF g

<280

<280

DN 40 ISO-KF g <320
DN 40 CF-F & CF-R g <570 <570
防護(hù)等級(jí) IP 40 IP 40
CE conformity    
RoHS 2011/65/EU  
EMC 2014/30/EU, EN 61000-6-2, EN 61000-6-3, EN 61326-1  
Safety EN 61010-1  
RS232C / 485C (MxG50x)    
Baud rates kBaud 9.6/ 19.2/ 38.4/ 57.6  
Address 2 switches (address 00 - 255)  
Digital functions Read pressure, select Units: Torr, mbar, Pa, micron, counts. Monitor gauge Status, detailed Alarm and warning Information, safe state allows Definition of behaviour in case of error.  
Connector for RS232 & RS485 D-Sub HD, 15-pin, male  
EtherCAT® (MxG55x)    
Protocol EtherCAT®

 

 
Communication standard

ETG.5003.1  S (R) V1.1.0 4)

ETG.5003.2080 S (R) V1.3.0 5)

 
Node address Explicit Device Identification  
Physical layer 100Base-Tx (IEEE 802.3)  
Digital functions Read pressure, select Units: Torr, mbar, Pa, micron, counts. Monitor gauge Status, detailed Alarm and warning Information, safe state allows Definition of behaviour in case of error.  
EtherCAT connector 2 x RJ45, 8-pin (socket), Input & output  
EtherCAT cable Special Ethernet Patch cable or crossover cable, shielded (CAT5e Quality or higher)  
Cable lenght m (ft.) <100 (330)  

1)沒(méi)有電子元件。

2)電源單元的小電壓必須與傳感器電纜的長(zhǎng)度成比例地增加。

3)冷陰極點(diǎn)燃。

Gemini Ordering Information_13.03.2019.PNG

附件

MAG5xx
零件號(hào) 明細(xì)
211-098 細(xì)目過(guò)濾中心環(huán)組件DN 25 ISO-KF
351-550 MxG50x 點(diǎn)火單元
211-113 中心圈 with baffle DN 25 KF
353-512 Baffle for BPG400
MPG5xx
零件號(hào) 明細(xì)
211-098 細(xì)目過(guò)濾中心環(huán)組件DN 25 ISO-KF
351-550 MxG50x 點(diǎn)火單元
211-113 中心圈 with baffle DN 25 KF
353-512 Baffle for BPG400

備件

MAG5xx
零件號(hào) 明細(xì)
351-500 MAG500 spare sensor, 25KF, SS
351-556 Spare ion chamber ti
351-512 MAG500 spare sensor, 40KF, SS
351-536 MAG500 spare sensor, 40CF-R, SS
351-524 MAG500 spare sensor, 40CF-F, SS
351-502 MAG500 spare sensor, 25KF, TI
351-514 MAG500 spare sensor, 40KF, TI
351-538 MAG500 spare sensor, 40CF-R, TI
351-526 MAG500 spare sensor, 40CF-F, TI
351-501 MAG504 spare sensor, 25KF, SS
351-513 MAG504 spare sensor, 40KF, SS
351-537 MAG504 spare sensor, 40CF-R, SS
351-525 MAG504 spare sensor, 40CF-F, SS
351-503 MAG504 Ersatzsensor, 25KF, TI
351-515 MAG504 spare sensor, 40KF, TI
351-539 MAG504 spare sensor, 40CF-R, TI
351-527 MAG504 spare sensor, 40CF-F, TI
351-995 起輝器
351-555 Spare ion chamber ss
MPG5xx
零件號(hào) 明細(xì)
351-506 MPG500 spare sensor, 25KF, SS
351-518 MPG500 spare sensor, 40KF, SS
351-542 MPG500 spare sensor, 40CF-R, SS
351-530 MPG500 spare sensor, 40CF-F, SS
351-508 MPG500 spare sensor, 25KF, TI
351-520 MPG500 spare sensor, 40KF, TI
351-544 MPG500 spare sensor, 40CF-R, TI
351-532 MPG500 spare sensor, 40CF-F, TI
351-507 MPG504 spare sensor, 25KF, SS
351-519 MPG504 spare sensor, 40KF, SS
351-543 MPG504 spare sensor, 40CF-R, SS
351-531 MPG504 spare sensor, 40CF-F, SS
351-509 MPG504 spare sensor, 25KF, TI
351-521 MPG504 spare sensor, 40KF, TI
351-545 MPG504 spare sensor, 40CF-R, TI
351-533 MPG504 spare sensor, 40CF-F, TI
351-995 起輝器
351-555 Spare ion chamber ss
351-556 Spare ion chamber ti

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